Name :Single crystal silicon(large size)
Desciption :We can provide the the size from 200mm to 400mm in diameter, including single crystal silicon rod, heavily doped silicon polished wafers, Lightly doped polished wafers
Application.:Large Scale Integration(LSI)


Diameter Type/Orientation Resistivity(Ω.cm) Slip Length    
200mm-300mm P<100> or as customer required <0.02 free 150mm-500mm
1-5
60-90
300mm-450mm P<100> or as customer required <0.02 free or allowed 150mm-400mm
1-5
60-90
 
Item 300mm 300mm epi 200mm 150mm 125mm 100mm
Type P,N P,N P,N P,N P,N P,N
Orientation <100> <100> <100>,<111> <100>,<111> <100>,<111> <100>,<111>
Dopant B,P B,P B,P,AS,Sb,Red Phos B,P,AS,Sb,Re Phos B,P,AS,Sb,Re Phos B,P,AS,Sb,Re Phos
Resistivity(Ω.cm) 0.5-100 0.1-50 P/B     0.0035-90 P/B     0.0035-90
N/As    0.001-0.005 N/As    0.001-0.005
N/Sb    0.005-0.1 N/Sb    0.005-0.1
N/P     0.07-70 N/P     0.07-70
N/Red P     0.0007-0.0018 N/Red P     0.0007-0.0018
Thickness(μm) 775±25 775±25 625,675,725 375,450,525,625,675 290,375,450,525,625 290,350,450,525
Front Surface Polished Epi Polished Polished Polished Polished
STIR(μm) SFQR<0.15μm,25mm×25mm SFQR<0.15μm,25mm×25mm <1.2 , 25mm×25mm <1 , 15mm×15mm 1-1.5 , 15mm×15mm 1-2.0 , 15mm×15mm
TTV(μm) GBIR<2μm GBIR<2μm <4 2.5-3 <4 <4
Particle <100,@0.12μm <100,@0.12μm <10,@0.2μm <10,@0.3μm <10,@0.3μm <10,@0.3μm
Back Surface Polished Polished BSD,Poly back,SiO2,Ethed BSD,Poly back,SiO2,Ethed BSD,Poly back,SiO2,Ethed BSD,Poly back,SiO2,Ethed


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